| 設備技術參數 Equipment technical parameters |
| 真空室材質 Vacuum chamber material | 不銹鋼、碳鋼 Stainless steel, carbon steel |
| 蒸鍍方式 Metalizing mode | 單面鍍膜、雙面鍍膜 Single side coating, double side coating |
| 蒸鍍模式 Metalizing model | 磁控濺射 Magnetron sputtering |
| 有效鍍寬 Effective width of coating | 400mm-1700mm |
| 最大卷徑 Max.rolling diameter | 500mm-1300mm |
| 卷繞速度 Wind speed | 1m/min ～15m/min（2m/min ～30m/min） |
| 可鍍材料 Can be plated material | 銅、鉻、鈦、銀等 Cu, Cr, Ti, Ag, etc |
| 鍍膜基材 Coating substrate | PET（3.8U-300U）PI（15U-150U）銅、鋁箔、無紡布、紙等各種卷材 PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils |
| 常用真空抽氣時間 Commonly used vacuum extraction time | 清潔容器抽至8.5×10-3Pa≤30min Clean the container until 8.5×10-3pa ≤30min |
| 極限真空抽氣時間 Limit vacuum time | 清潔空容器抽至5×10-4Pa≤24h Clean empty containers and pump until 5×10-4pa ≤24h |
| 極限壓力（清潔、空載） Extreme pressure (clean, no load) | 7×10-4Pa |
| 水冷輥直徑 Diameter of water-cooled roll | φ500mm-φ1200mm |
| 水冷輥冷凍工作溫度 Water cooling roller freezing working temperature | -25℃～80℃ |
| 離子源 Ion source | 線性離子源 Linear ion source |
| 靶體形式 The target body form | 平面靶、圓柱靶 Plane target、 cylindrical target |
| 磁控靶電源 Magnetic target power supply | 直流、中頻 Dc，if |
| 磁控靶工作壓力 Magnetic target operating pressure | 2×10-1Pa |
| 磁控靶工作氣體 Magnetically controlled target working gas | 氬氣、氧氣，純度99.99% Ar, O2, 99.99% purity |
| 磁控靶工作氣體控制方式 Magnetic target working gas control mode | 質量流量控制器控制 Mass flow controller control |
| 卷繞系統 The winding system | 采用西門子變頻恒張力全自動收放卷系統 Siemens variable frequency constant tension automatic winding and unwinding system is adopted |
| 舒展系統 Stretch system | 收卷放卷端各有一條360度可調舒展輥 There is a 360-degree adjustable stretch roll at each end of winding and unwinding |
| 驅動電機 Drive motor | 西門子電機 Siemens motor |
| 氣脹軸 Inflatable shaft | 脹塊式、鍵條式等 Bulk-type, key-bar type, etc |
| 氣脹軸直徑 Inflation axis diameter | 3″、 6″氣脹軸 3 ", 6 "gas expansion axis |
| 真空系統 Vacuum system | φ400分子泵，速度3600升/秒 Phi 400 molecular pump, speed 3600 L/S |
| ZJ2500羅茨泵，速度2500升/秒 ZJ2500 roots pump, speed 2500 L/S |
| 2H160滑閥泵,速度160升/秒 2H160 slide valve pump, speed 160 L/S |
| 冷暖交換機組 Heating and cooling exchange unit |
| 深冷捕集器 Cryogenic trap |
| 功率 power | 90KW-200KW |
| 電源 The power supply | 380V 三相五線 380V Three phase five wire |
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