| 不銹鋼、碳鋼 Stainless steel, carbon steel |
| 單面鍍膜、雙面鍍膜 Single side coating, double side coating |
| 感應蒸發、磁控濺射 Induction evaporation, magnetron sputtering |
| 400mm-1700mm |
| φ500mm-φ800mm |
| 1m/min～15m/min（2m/min～30m/min、50m/min～800m/min） |
| 銅、鉻、鈦、銀等 Cu, Cr, Ti, Ag, etc |
| PET（3.8U-300U）PI（15U-150U）銅、鋁箔、無紡布、紙等各種卷材 PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils |
| 清潔容器抽至6X10-3Pa≤20min Clean the container until 6x10-3pa≤20min |
| 清潔空容器抽至8×10-4Pa≤24h Clean empty containers and pump until 8×10-4pa≤24h |
| 8×10-4Pa |
| φ500mm-φ1200mm |
| -25℃～80℃ |
| 平面靶、圓柱靶 Plane target, cylindrical target |
| 直流、中頻 Dc, if |
| 2×10-1Pa |
| 氬氣、氧氣，純度99.99% Ar, O2, 99.99% purity |
| 質量流量控制器控制 Mass flow controller control |
| 采用西門子變頻恒張力全自動收放卷系統 Siemens variable frequency constant tension automatic winding and unwinding system is adopted |
| 收卷放卷端各有一條360度可調舒展輥 There is a 360-degree adjustable stretch roll at each end of winding and unwinding |
| 西門子電機 Siemens motor |
| 脹塊式、鍵條式等 Bulk-type, key-bar type, etc |
| 3″、 6″氣脹軸 3 ", 6 "gas expansion axis |
| 2000L分子泵，速度為2000升/秒 2000L molecular pump with a speed of 2000 L/S |
| 3600L分子泵，速度為3600升/秒 3600L molecular pump at a speed of 3600 L/S |
| ZJ1200羅茨泵組，速度為1200升/秒 ZJ1200 roots pump set, speed 1200 L/S |
| ZJ2500羅茨泵組，速度為2500升/秒 ZJ2500 roots pump set, speed 2500 L/S |
| 2H150滑閥泵，每臺速度150升/秒 2H150 slide valve pump, 150 L/S per set |
| 冷暖交換機組 Heating and cooling exchange unit |
| 深冷捕集器 Cryogenic trap |
| 100KW-400KW |
| 380V 三相五線 380V Three phase five wire |
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